RF plasma parameter determination by a Langmuir multipoint double probe array
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2012
ISSN: 1742-6596
DOI: 10.1088/1742-6596/370/1/012055